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高精度平面气浮导轨的误差均化效应研究
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陕西省教育厅科研计划项目(15JK1338)


Research on Error Averaging Effect of High Accuracy Plane Gas Floating Guide
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    摘要:

    气浮导轨具有高运行精度、高平稳性的一个重要因素在于气体具有误差均化作用。为了探究误差均化作用的大小,通过多个不同波长的正弦函数来模拟导轨轮廓误差,建立平面气浮导轨物理模型,采用有限差分的数值计算方法求出动气浮导轨在运动过程中的各个平衡位置参数,进而利用最小包容法求出其运行直线度。结果表明:气体润滑很好地实现了气浮导轨误差均化作用,且效果明显;与无气体润滑状态时相比,气浮导轨在通气状态时的运行直线度提高了约一倍,与静导轨轮廓误差相比提高了约2/3。建立的气体误差均化效应计算方法为探究误差均化的影响因素奠定了理论基础。

    Abstract:

    An important factor for the stability of air floating guide rail with high operating accuracy and stability is that the gas has error averaging effect.In order to study the error averaging effect,through multiple different wavelength of the sine function,the guide rail profile error was simulated,and the physical model of the plane air floating was establish.MatLab and finite difference numerical method were used to calculate the equilibrium position parameters of the air floating guide rail in motion process,and the least tolerance method was used to calculate the operation straightness of air floating guide rail.The results show that a obvious error averaging effect is found for air floating guide rail by gas lubrication.Compared with no gas lubrication,the operation straightness of air floating guide in the ventilation state is improved by about one times,the profile error is improved by about 2/3 compared with that of static guide rail.The established calculation method of gas error averaging effect provides a theoretical basis for the study on all influential factors of error averaging effect.

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刘锡尧,赵晓龙,刘波,张君安.高精度平面气浮导轨的误差均化效应研究[J].润滑与密封,2016,41(6):49-53.
LIU Xiyao, ZHAO Xiaolong, LIU Bo, ZHANG Junan. Research on Error Averaging Effect of High Accuracy Plane Gas Floating Guide[J]. Lubrication Engineering,2016,41(6):49-53.

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  • 在线发布日期: 2016-07-07
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