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CrN、CrSiN薄膜在不同介质下的摩擦学性能对比研究
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国防基础科研重点项目(A0320132009)


Tribological Properties of CrN and CrSiN Films under Different Medium
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    摘要:

    采用中频非平衡反应磁控溅射法在单晶硅〖BF〗P(111)〖BFQ〗和不锈钢(304SS)基材上制备CrN和CrSiN薄膜;利用球-盘式摩擦磨损试验机(CSM)考察2种薄膜在不同介质(空气、去离子水、质量分数35%NaCl 溶液)中和WC/Co球对摩的摩擦学性能。结果表明:大气环境下,CrN与CrSiN薄膜的磨损机制主要是磨粒磨损;水润滑下,CrN薄膜主要因机械抛光作用,CrSiN薄膜主要因摩擦化学反应,使得摩擦因数减小;在35%NaCl 溶液中CrN薄膜易被腐蚀,由于NaCl颗粒析出以及涂层接触区域的腐蚀和磨损产物,作为第三体的润滑作用,导致摩擦磨损发生明显变化,而CrSiN薄膜不易被腐蚀,主要因摩擦化学反应,使得摩擦磨损性能发生显著变化。

    Abstract:

    CrN and CrSiN films were deposited on silicon and stainless steel substrates by middle frequency unbalanced reactive magnetron sputtering,and their tribological properties in different medium (air,deionized water,35%NaCl(weight content)sliding against WC/Co balls were investigated by ballondisk tribometer (CSM).The results show that the main wear mechanism of CrN and CrSiN films is abrasive wear in air.Under water,the friction coefficients of the films are reduced due to the mechanical polishing for CrN film and due to tribological chemical reaction for CrSiN film.In 35% NaCl solution,the CrN film is easy to corrosion,due to the third body lubrication from the NaCl particles separated out as well as the products of corrosion and abrasion in contact area,its properties of friction and wear are changed obviously.While the CrSiN film is not easy to corrosion,due to tribological chemical reaction,its properties of friction and wear are significantly changed.

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鞠鹏飞,王海新,蒲吉斌,苏培博,宋晓航,张广安. CrN、CrSiN薄膜在不同介质下的摩擦学性能对比研究[J].润滑与密封,2016,41(10):86-90.
JU Pengfei, WANG Haixin, PU Jibin, SU Peibo, SONG Xiaohang,ZHANG Guangan. Tribological Properties of CrN and CrSiN Films under Different Medium[J]. Lubrication Engineering,2016,41(10):86-90.

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  • 在线发布日期: 2017-01-03
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