An onedimension silicon grating with 600 nm period was used to simulate the equal roughness surface,and the influence of AFM parameter on adhesion of the equal roughness surface was study.The AFM probe used was plateau probe (PL2CONTR10,Nanosensors) with a diameter 2 μm.The experiments were performed in a dry nitrogen and under the ambient condition,the forcedisplacement curves were obtained and the mean value and the deviation of the adhesion force were calculated.The results show that the adhesion force is increased or decreased slightly with the increasing of loading force and residence time,but the overall change is not great.Under the ambient condition,the adhesion force is increased at the beginning and then decreased with the increasing piezo speed;While the adhesion force in dry nitrogen is decreased with the increasing piezo speed.