Abstract:Chemical mechanical polishing experiments of glass ceramics substrates were carried out by using selfmade polishing liquid to investigate the effects of the species and the concentration of complexing agent,the kinds of oxidant,the species and the concentration of lubricant on the material removal rate and the surface roughness.The experimental results reveal that the surface roughness can be significantly reduces by adding EDTA with 02% mass fraction,the higher material removal rate and the more smooth surface can be obtained by adding (NH4)2S2O8 with 2% mass fraction,and the surface roughness can be reduced by adding glycerol with 02% mass fraction.Glass ceramics substrates were polished by SiO2 slurry which consisted of EDTA,(NH4)2S2O8 and glycerol.The surface roughness of the glass ceramics substrates before and after being polished was characterized by atomic force microscope (AFM).The result shows that the surface of the glass ceramics is very smooth,the surface roughness is 012 nm after polishing,and the material removal rate reaches 728 nm/min.
