Abstract:TiB-2/DLC nanomultilayer films were fabricated on silicon P(100) wafer and 304 stainless steel substrates by unbalanced magnetron sputtering system.The microstructure,surface and cross section morphologies were characterized by using Xray diffraction(XRD),atomic force microscopy(AFM),field emission scanning electron microscope(FESEM),transmission electron microscope(TEM),respectively.Vickers indentation,nanoindentation,friction tests were employed to investigate the effect of TiB2 target current on the mechanical and tribological properties.The results show that the TiB2/DLC multilayer film exhibits welldefined multilayer modulation structure,and the multilayers have a TiB2(101) preferred orientation.The surface roughness of the multilayers is increased with the TiB2 target current increasing.The hardness and toughness of the TiB2/DLC multilayer films are significantly improved,which is caused by the large content of heterogeneous interfaces.Harness of the multilayer film with TiB2 target current 20 A is twice higher than that of the monolayer DLC film.In the TiB2/DLC multilayers,the hard TiB2 layer shows superior carrying capacity,while the soft DLC layer plays a lubricating role in the friction process.Therefore,the TiB2/DLC multilayers show a lower friction coefficient compared with monolayer DLC film.