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磁控溅射沉积TiB-2/DLC纳米多层膜的结构及其机械性能研究
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国家自然科学基金项目(51405476;21373249).


Microstructure and Mechanical Properties of TiB-2/DLC Nanomultilayer Films Deposited by Magnetron Sputtering
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    摘要:

    采用非平衡磁控溅射系统在P(100)硅片和304不锈钢基底上制备TiB2/DLC纳米多层膜。利用FESEM、TEM、XRD和AFM观察多层膜的微观结构和表面形貌;利用纳米压痕仪、维氏硬度计和CSM球-盘摩擦磨损试验机考察TiB2靶电流对多层膜的机械性能和摩擦学性能的影响。结果表明:TiB2/DLC多层膜具有良好的多层调制结构,多层膜沿TiB2(101)晶向择优生长;多层膜的表面粗糙度随着TiB2靶电流增加而增加;多层膜中的大量异质界面能显著提高薄膜的硬度及韧性,而且当TiB2靶电流为20 A时,多层膜的硬度约为单层DLC薄膜的两倍;多层膜中具有硬质TiB2层和软质DLC层的交替结构,在摩擦过程中,硬层TiB2起到良好的承载作用,软层DLC起到良好的润滑作用,使多层膜具有比单层DLC薄膜更低的摩擦因数。

    Abstract:

    TiB-2/DLC nanomultilayer films were fabricated on silicon P(100) wafer and 304 stainless steel substrates by unbalanced magnetron sputtering system.The microstructure,surface and cross section morphologies were characterized by using Xray diffraction(XRD),atomic force microscopy(AFM),field emission scanning electron microscope(FESEM),transmission electron microscope(TEM),respectively.Vickers indentation,nanoindentation,friction tests were employed to investigate the effect of TiB2 target current on the mechanical and tribological properties.The results show that the TiB2/DLC multilayer film exhibits welldefined multilayer modulation structure,and the multilayers have a TiB2(101) preferred orientation.The surface roughness of the multilayers is increased with the TiB2 target current increasing.The hardness and toughness of the TiB2/DLC multilayer films are significantly improved,which is caused by the large content of heterogeneous interfaces.Harness of the multilayer film with TiB2 target current 20 A is twice higher than that of the monolayer DLC film.In the TiB2/DLC multilayers,the hard TiB2 layer shows superior carrying capacity,while the soft DLC layer plays a lubricating role in the friction process.Therefore,the TiB2/DLC multilayers show a lower friction coefficient compared with monolayer DLC film.

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任宁,何东青,张广安.磁控溅射沉积TiB-2/DLC纳米多层膜的结构及其机械性能研究[J].润滑与密封,2017,42(12):56-63.
. Microstructure and Mechanical Properties of TiB-2/DLC Nanomultilayer Films Deposited by Magnetron Sputtering[J]. Lubrication Engineering,2017,42(12):56-63.

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  • 在线发布日期: 2018-03-16
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