From the ternary Mocontaining CrMoN,MoSiN and MoCN thin films to the quaternary CrMoSiN and MoSiCN films,the progress in the structure,mechanical properties and tribological properties of multivariate CrMoSiCN thin films were reviewed.The changes in the structure of the films at different gas pressures,preparation methods and parameters,and various element contents were analyzed.The effects of the structure of the films on the correlation between the mechanical properties and frictional characteristics were explained.It was pointed out that the structure,hardness and friction coefficient of series of CrMoSiCN thin films are strongly influenced by the content of Mo,Si,C and N elements and the mechanical properties are closely associated with the microstructure of the films.The tribological properties of the films are related to grain refinement and amorphous matrix as a lubricant.In addition,the wear resistance of the films is also effectively improved due to the tribochemical reactions during the friction process.For quaternary CrMoCN and multicomponent CrMoSiCN films,it is suggested that further study be carried out on whether Mocontaining oxide selflubricating films can be effectively formed under different conditions of waterlubrication and nonlubrication due to their differences in structural components,such as seawater or dry air friction,in order to improve the adaptability and antifriction properties of the films under more occasions.