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氩气对金刚石膜碳价键、粒径和表面形貌的影响
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国家自然科学基金项目(51071143);中央高校基本业务费资助项目.


Effect of Argon on Carbon Bond,Particle Size and Surface Morphology of Diamond Films
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    摘要:

    为调整微钻表面金刚石薄膜的晶粒尺寸和粗糙度以满足PCB板钻孔的工况要求,调节氩气和氢气流量比,采用热丝化学气相沉积法,以甲烷、氢气及氩气为气源在硅基体上沉积出一系列金刚石薄膜。利用拉曼光谱仪、X射线衍射仪(XRD)、扫描电子显微镜(SEM)及原子力显微镜(AFM),分别表征不同氩气流量下制备的金刚石薄膜的碳价键结构、晶面取向、晶粒尺寸和表面粗糙度。结果表明:随着氩气流量增大,金刚石薄膜中的石墨含量呈升高趋势,薄膜趋向(111)晶面择优生长,晶粒尺寸从微米级(127 μm)细化至纳米级,薄膜粗糙度先升高后降低,最低为65 nm。研究表明,存在最优的氩气流量使得制备的薄膜具有适宜的结构特点,如碳价键含量高、(111)晶面取向度高、晶粒尺寸小和粗糙度低,可满足PCB板超细钻孔的要求。

    Abstract:

    In order to adjust the grain size and roughness of diamond film on the surface of microdrill to meet the requirements of drilling in PCB plate,by adjusting the flow ratio of argon and hydrogen,a series of diamond thin films were deposited on the silicon substrate by hot filament chemical vapor deposition(HFCVD)with methane,hydrogen and argon as the gas source.Raman spectroscopy,X ray diffractometer(XRD),scanning electron microscopy(SEM)and atomic force microscopy(AFM)were used to characterize the carbon bond structure,crystal orientation,grain size and surface roughness of the diamond films prepared at different flow rate of argon,respectively.The results show that,with the increase of argon flow rate,the graphite content in the diamond film is increased,the crystal plane orientation of the film tends to(111)crystal surface,the grain size is changed from micron scale(127 μm)to nanoscale,and the film roughness is first increased and then decreased.The lowest film roughness is 65 nm.Experimental results show that there is an optimum argon flow rate which makes the diamond film on the surface of microdrill have suitable structural characteristics,such as high carbon valence bond content,(111)crystal orientation,small grain size and low roughness to meet the requirements of ultrafine drilling in PCB plate.

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严尚飞,于翔,张静.氩气对金刚石膜碳价键、粒径和表面形貌的影响[J].润滑与密封,2019,44(8):68-73.
. Effect of Argon on Carbon Bond, Particle Size and Surface Morphology of Diamond Films[J]. Lubrication Engineering,2019,44(8):68-73.

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  • 在线发布日期: 2020-03-12
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