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类富勒烯碳薄膜的结构演变及摩擦学性能研究
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国家自然科学基金项目(中瑞:51611530704)


Study on Structural Evolution and Tribological Properties of Fullerenelike Carbon Films
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    摘要:

    通过等离子体增强化学气相沉积技术,以不同沉积时间在硅表面上制备类富勒烯碳薄膜,探究类富勒烯碳薄膜结构演变和摩擦学性能随沉积时间变化规律。利用拉曼光谱和透射电子显微镜,考察类富勒烯碳薄膜微结构和表面形貌随沉积时间的变化。结果表明:碳薄膜内类富勒烯结构含量随沉积时间先增加后保持不变;采用沉积时间为3 h的类富勒烯碳薄膜组成摩擦配伍对,当载荷从8 N增加到14 N时,摩擦因数从0.013降至0.006,即随载荷的增加实现了由低摩擦向超滑的转变。这是因为摩擦诱使类富勒烯碳薄膜发生结构转变,并形成有利于减少摩擦的类球状或外部石墨壳层闭合的纳米颗粒。

    Abstract:

    Fullerenelike carbon films were deposited on silicon substrates at different deposition times by plasma enhanced chemical vapor deposition,and their evolution of structure and tribological properties with deposition time were investigated.Raman spectroscopy and transmission electron microscopy were used to analyze the microstructure and surface morphology transformation of the films with different deposition time.The results indicate that the content of fullerenelike structure in carbon films is increased first and then remains unchanged.When the fullerenelike carbon films with deposition time of 3 h is used as friction pairs,the friction coefficient is decreased from 0.013 to 0.006 when the load is increased from 8 N to 14 N,indicating the transition from low friction to ultralow friction is realized with the increasing of load.This is because that friction induces the structural transformation of fullerenelike carbon films,and spherical like or external graphite shell closed nanoparticles which are beneficial to reduce friction are formed.

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杨保平,岳照凡,王永富,白永庆,张俊彦.类富勒烯碳薄膜的结构演变及摩擦学性能研究[J].润滑与密封,2020,45(1):7-10.
. Study on Structural Evolution and Tribological Properties of Fullerenelike Carbon Films[J]. Lubrication Engineering,2020,45(1):7-10.

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  • 在线发布日期: 2020-04-23
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