欢迎访问润滑与密封官方网站!

咨询热线:020-32385313 32385312 RSS EMAIL-ALERT
氩气流量对非平衡磁控溅射Ti/WS2复合薄膜结构和摩擦学性能的影响
作者:
作者单位:

作者简介:

通讯作者:

中图分类号:

基金项目:

河南省科技攻关项目(202102210073)


Effect of Argon Flow Rate on the Structure and Tribological Properties of Ti/WS2 Composite Films by Unblanced Magnetron Sputtering
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    采用非平衡磁控溅射技术制备Ti/WS2复合薄膜。利用扫描电镜(SEM)、能谱仪(EDS)、纳米压痕仪和摩擦磨损试验机分别对复合薄膜的微观形貌、成分、硬度以及摩擦磨损性能进行测试,研究氩气流量对Ti/WS2复合薄膜微观形貌和摩擦学性能的影响。结果表明:随着氩气流量增加,Ti/WS2复合薄膜的疏松结构明显改善,薄膜致密度得到了提高,且Ti/WS2复合薄膜的(002)晶面择优取向增强;随着氩气流量的增加,Ti/WS2复合薄膜的摩擦因数呈现逐渐降低趋势,磨损率逐渐减小,且磨损机制由明显的磨粒磨损特征转变为轻微的磨粒磨损特征,呈现出较好的耐磨性。

    Abstract:

    Ti/WS2composite films were prepared by unbalanced magnetron sputtering.Scanning electron microscopy (SEM),energy dispersive spectroscopy (EDS),nano indentation and friction and wear testing machine were used to test the micro morphology,composition,hardness and friction and wear properties of the composite films.The effect of argon flow rate on the micro morphology and tribological properties of Ti/WS2 composite films was studied.The results show that with the increase of argon flow rate,the loose structure of Ti/WS2 composite film is improved obviously,and the film density is increased,and the preferred orientation of (002) crystal surface of Ti/WS2 composite film is enhanced.With the increase of argon flow rate,the friction coefficient and wear rate of Ti/WS2 composite film is decreased gradually,and the wear mechanism changes from obvious abrasive wear characteristics to slight abrasive wear characteristics,showing better wear resistance.

    参考文献
    相似文献
    引证文献
引用本文

蔡海潮,王景华,叶 军,韩 江,薛玉君,王东峰.氩气流量对非平衡磁控溅射Ti/WS2复合薄膜结构和摩擦学性能的影响[J].润滑与密封,2020,45(8):36-40.
CAI Haichao, WANG Jinghua, YE Jun, HAN Jiang, XUE Yujun, WANG Dongfeng. Effect of Argon Flow Rate on the Structure and Tribological Properties of Ti/WS2 Composite Films by Unblanced Magnetron Sputtering[J]. Lubrication Engineering,2020,45(8):36-40.

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2020-10-15
  • 出版日期: