中国工程物理研究院总体工程研究所;哈尔滨工业大学机电工程学院
TG662
国家自然科学基金项目(50975058)
1(1.Institute of Structural Dynamic,China Academic of Engineering Physics,Mianyang Sichuan 621900,China; 2.Mechanical and Electrical Engineering,Harbin Institute of Technology,Harbin Heilongjiang 150001,China)
闫茂振,翟文杰,孙素梅,欧阳勇.电压对铜电化学机械平整化性能影响的实验研究[J].润滑与密封,2013,38(1):51-55,60.
Yan Maozhen, Zhai Wenjie, Sun Sumei, Ouyang Yong. Experimental Study on Electrochemical Mechanical Planarization Performance of Cu with Different Applied Voltages[J]. Lubrication Engineering,2013,38(1):51-55,60.