A temperature rising model of the atomic vibration was established by the view of the relationship between the micro structure and the temperature in contact surface, the activation mechanism of temperature to interfacial friction process was studied. The results indicate that, considering single factor of atomic mass, the changing of atomic mass suppresses friction interface temperature rising, and the higher of interface temperature the more significant of inhibitory effect. Considering the impact of atomic mass and atomic natural frequency, when the relative sliding velocity is small and the interface temperature is lower, the changing of atomic mass on the tribological activation is very small, but when the relative sliding speed is higher and the interface temperature is high, the changing of atomic mass has the positive activation obviously. Characteristic of crystal constant with temperature change has the inhibition effect on tribological process, and the bigger the thermal expansion coefficient of crystal, the more obvious inhibition is.