WC/DLC composite films with different tungsten content were deposited by PECVD assisted unbalanced magnetron sputtering technology.Controlling of tungsten content was realized by adjusting WC target power.Tungsten content of WC/DLC films was measured by EDS.Surface morphology and structure of the films were analyzed by using SEM.Influence of different tungsten content on microstructure of the films was analyzed by using Raman spectroscopy.Nano hardness of films was tested on CSM Nano-hardness tester.Tribological properties of the films were tested on ball-on-disk friction tester in atmosphere.The relationship between mechanical properties,tribological properties and tungsten content was also researched.The results show that,as increasing of WC target power,the tungsten content of the films is increased.WC/DLC films have typical diamond-like carbon film structure,and the hardness and sp3 bonding contents in films are also increased along with increasing of tungsten content.The friction coefficient and wear lifetime of the films show a trend of first increase and then decrease along with increasing of tungsten content.When tungsten content is in atom mass fraction of 41.67%,the films show the lowest friction coefficient,and the best wear lifetime.