The hydrogenated carbon films were deposited on Si (100) substrates by an unipolar plasma enhanced chemical vapor deposition technology.High resolution transmission electron microscopy and laser Raman spectroscopy were used to study the microstructure of the asdeposited film.Xray photoelectron spectroscope was used to analyze the chemical bonding state of the film.Nanoindentation was used to probe the hardness and elastic modulus and the tribological properties of the film were evaluated on a CSM commercial reciprocating ballondisk tribometer.The results show that the hydrogenated carbon films with nanometer size curved fullerenelike structures embedded in the amorphous carbon matrix are successfully fabricated on plasma enhanced chemical vapor deposition system.The better mechanical properties that the elastic recovery coefficient and hardness are as high as 86% and 26.37 GPa,are ascribed as the unique fullerenelike nanostructures.Compared with amorphous structure film,the nanostructure film has excellent tribological performance in ambient conditions,which has a broad prospect for industrially application in the mechanical surfaces.