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脉冲偏压对PECVD制备DLC薄膜的结构及性能的影响
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广东省科技计划项目(2016A010102009);广州市科技计划项目(201707010055).


Effects of Pulse Bias Voltages on Structure and Property of DLC Films Prepared by PECVD Technique
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    摘要:

    在不锈钢基材表面利用等离子体增强化学气相沉积技术(PECVD)改变脉冲偏压制备不同结构类金刚石薄膜(DLC)。分别采用表面轮廓仪、扫描电镜、拉曼光谱及电子探针分析薄膜的表面粗糙度、断面形貌、薄膜结构及成分,采用纳米压痕仪及划痕仪测试薄膜的纳米硬度、弹性模量和膜基结合力,采用球盘摩擦试验机测试薄膜在大气环境中的摩擦学性能。结果表明:脉冲偏压显著影响PECVD制备的DLC薄膜的表面粗糙度、微观形貌、膜基结合力、纳米硬度及摩擦学性能;随偏压的增大,DLC薄膜的表面粗糙度,摩擦因数及磨损量都先减小后增大,而膜基结合力则先增大后减小。其中2.0 kV偏压制备的DLC薄膜具有最强的膜基结合力,而1.6 kV偏压制备的DLC薄膜具有最低的表面粗糙度、最高的硬度和最优的减摩耐磨性能。

    Abstract:

    The diamondlike carbon (DLC) films were prepared on the surface of 304 stainless steel by plasma enhanced chemical vapor deposition (PECVD) technique with varying pulse bias voltages.The surface roughness,the crosssectional morphology,the structure and composition of the films were characterized by surface profilometer,scanning electron microscopy,Raman spectrum and electron probe,respectively.The hardness and elastic modulus of the films were tested on a nanoindentor,and the corresponding adhesion forces between the film and substrate were investigated using a scratch tester.The tribological properties of the films were evaluated by a ballondisc tribometer.The results show that the DLC films are successfully prepared by PECVD technique and the applied pulsed bias voltages greatly affect the morphologies,microstructures and mechanical properties of the asprepared DLC films.With the increasing of the bias voltages,the surface roughness,friction coefficient and wear rate of the DLC film are decreased to a minimum value and then start to increase,while the adhesion force between the film and the substrate is increased to a maximum value and then slightly decreased.The film prepared with 20 kV pulse bias voltage exhibits optimal adhesion force to the substrate.However,the film prepared with 16 kV bias voltage shows the smoothest surface and the highest hardness,resulting in superior friction reduction and wear resistance.

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陈国富.脉冲偏压对PECVD制备DLC薄膜的结构及性能的影响[J].润滑与密封,2018,43(3):17-22.
陈国富. Effects of Pulse Bias Voltages on Structure and Property of DLC Films Prepared by PECVD Technique[J]. Lubrication Engineering,2018,43(3):17-22.

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  • 在线发布日期: 2018-04-24
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