采用具有600 nm周期的一维硅光栅来表示等高粗糙表面，研究AFM的测试参数对等高粗糙表面的黏着影响。实验所使用的探针为平头探针(PL2 CONTR10,Nanosensors)，其针尖直径为2 μm，实验分别在空气中以及干燥环境下进行，通过力曲线的测量，计算出黏着力的平均值以及标准差。结果表明：载荷与停留时间会引起黏着力的略微增大或减小，但总体影响不是很大；在空气中，随着退针速率加快，黏着力先表现出先增大然后减小的趋势；而在干燥环境下，黏着力随着退针速率的加快逐渐减小。
An onedimension silicon grating with 600 nm period was used to simulate the equal roughness surface,and the influence of AFM parameter on adhesion of the equal roughness surface was study.The AFM probe used was plateau probe (PL2CONTR10,Nanosensors) with a diameter 2 μm.The experiments were performed in a dry nitrogen and under the ambient condition,the forcedisplacement curves were obtained and the mean value and the deviation of the adhesion force were calculated.The results show that the adhesion force is increased or decreased slightly with the increasing of loading force and residence time,but the overall change is not great.Under the ambient condition,the adhesion force is increased at the beginning and then decreased with the increasing piezo speed;While the adhesion force in dry nitrogen is decreased with the increasing piezo speed.
CHEN Rongyu,HUANG Ping. Experimental Study on Adhesion with an Equal Roughness Surface by Changing AFM Parameters[J]. Lubrication Engineering,2016,41(5):6-9.