CNx thin films were deposited at 200、250、300 and 350 ℃ by DC magnetron sputtering.Xray diffraction (XRD) and SEM were used to analyze the microstructure and crosssection morphology.The mechanical and tribological behaviors were evaluated by nanoindentation and ballon disc instruments tester.The results show that the fullerenelike film as prepared is composed of sp2 C-C,sp2 N-C and sp3 C-N,and with the increasing deposition temperature,the microstructure of the fullerenelike film become denser,the hardness,modulus and elastic recovery are increased,while the friction coefficient and wear rate are decreased.The film deposited at the temperature of 350 ℃ has a lower friction coefficient and wear rate,showing excellent wear resistance.