In order to improve dry tribological properties of Ti-doped GLC/Ti films,the graphitelike carbon film were fabricated by magnetron sputtering under different carbon target currents.Scanning electron microscope (SEM),Raman spectrometer (Raman) were used to characterize the membrane structure.The hardness and elastic modulus of the thin film were measured by nano indentation instrument.The friction and wear performance of thin film under dry friction condition was tested by HSR2M high speed reciprocating testing machine.The wear marks were observed by white light interference.Results show that with the increase of C target current,the columnar growth trend of the thin film becomes more and more obvious,the density of the thin film,the sp2 bond content,the graphitization degree and the binding force are all decreased,and the hardness and the elastic modulus are slightly increased.Therefore,appropriate reduction of C target current can improve the friction reducing and wear resistance of GLC/Ti thin films under dry friction conditions.