国家02重大专项(2016ZX02301003-004_007);天津市自然科学基金项目(16JCYBJC16100);河北省自然科学基金项目(F2021202009)
闫晗,牛新环,张银婵,朱烨博,侯子阳,屈明慧,罗付.铜互连CMP工艺中缓蚀剂应用的研究进展*[J].润滑与密封,2022,47(12):164-171.
YAN Han, NIU Xinhuan, ZHANG Yinchan, ZHU Yebo, HOU Ziyang, QU Minghui, LUO Fu. Research Progress on the Application of Corrosion Inhibitors in Copper Interconnection CMP Process[J]. Lubrication Engineering,2022,47(12):164-171.