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沉积气压对氮化钒(VN)涂层微结构及其性能的影响*
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2020年“攀登计划”广东大学生科技创新培育项目(pdjh2020b1142);广州铁路职业技术学院校级项目;广州铁路职业技术学院大学生创新创业项目.


Effects of Deposition Pressure on Structure and Properties of VN Coatings by Multiarc Ion Plating
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    摘要:

    为研究沉积气压对VN涂层力学性能和摩擦性能的影响,采用离子镀制备VN涂层,利用X射线衍射仪、扫描电子显微镜等设备检测VN涂层的物相结构、表面形貌,采用划痕仪测试基体与涂层的膜基结合力,采用摩擦磨损试验机测试涂层的摩擦因数。结果表明:随着沉积氮气气压的升高,VN衍射峰强度逐渐增强,具有(200)晶面择优取向,表面平整度高;随着沉积氮气气压变化,涂层显微硬度和膜基结合力呈抛物线变化趋势,在氮气气压为1.0 Pa时,涂层硬度最高为HV2284,结合力最大为45 N,并具有稳定的摩擦因数,平均摩擦因数为0.85。通过调控沉积气压,多弧离子镀技术可以制备出性能更优越的VN涂层。

    Abstract:

    In order to investigate the effects of deposition pressure on the structure and properties of the VN coatings by multiarc ion plating,the VN coating were deposited by multiarc ion plating on YT15 carbide under different nitrogen pressure.The phase structure,surface morphology of the coatings were analyzed by XRD,XPS,SEM,the filmbased bond strength was measured by scratch tester,and the friction coefficient was investigated by friction and wear tester.The results show that with the increasing of nitrogen pressure,the intensity of diffraction of VN coatings is increased and the VN coatings have(200)preferential growth direction and have low surface roughness.The microhardness and adhesion force of the coating is firstly increased and then decreased.When the nitrogen pressure is 1 Pa,the coating prepared has the maximum hardness of HV2284,the maximum adhesion force of 45 N and stable friction coefficient with an average friction coefficient of 0.85.The VN coatings with better performance can be prepared by using multiarc ion platings through changing nitrogen pressure.

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刘怡飞,包改磊,李助军,李 磊,罗锡才,田灿鑫.沉积气压对氮化钒(VN)涂层微结构及其性能的影响*[J].润滑与密封,2021,46(5):68-74.
LIU Yifei, BAO Gailei, LI Zhujun, LI Lei, LUO Xicai, TIAN Canxin. Effects of Deposition Pressure on Structure and Properties of VN Coatings by Multiarc Ion Plating[J]. Lubrication Engineering,2021,46(5):68-74.

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  • 在线发布日期: 2022-03-10
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