In order to improve the performance of monolayer TiN coating,TiN/TiSiN multilayer coatings with thickness ratios of 1∶2,2∶2 and 3∶1 was prepared by AS600DMTXBE arc ion plating system assisted by anodic layer ion source.The morphology,composition and mechanical properties of TiN/TiSiN multilayer coatings were studied and compared with TiN coating.The results show that TiN/TiSiN multilayer coatings have a face-centered cubic structure,and the TiN/TiSiN multilayer coating with thickness ratio of 2∶2 has a strongest diffraction peak of TiN (111).The TiN/TiSiN multilayer coating with thickness ratio of 1∶2 has the lowest friction coefficient,indicating that the greater the content of Si,the better the antifriction performance of the coating.The antifriction,hardness and bonding strength of TiN/TiSiN multilayer coatings are better than those of TiN coating,and the hardness and bonding strength of TiN/TiSiN multilayer coating with thickness ratio of 2∶2 are the largest.The TiN/TiSiN multilayer coating with thickness ratio of 2∶2 has the highest corrosion resistance,indicating that the addition of Si can improve the corrosion resistance of the coating.