The coupling effect of surface waviness and geometric groove of seal face makes the variation of sealing performance more complicated.Based on the assumptions of rough and wavy surface and considering the cavitation effect,a theoretical model of upstream pumping liquid seal with inclined-ellipse-dimples was established,and the pressure distribution and leakage rate of upstream pumping face seal were numerically calculated.The influences of geometrical parameters such as waviness amplitude and waviness number and operating parameters such as rotational speed and sealing pressure on opening force and leakage rate were analyzed.The results show that considering the surface waviness,the seal face exhibits a higher hydrodynamic effect,but the surface waviness easily leads to the leakage of the sealing medium and weakens the upstream pumping effect.With the increase of wave amplitude and waviness number,the opening force slightly increases.The leakage rate is positively enhanced with the increase of wave amplitude,but the waviness number has no obvious effect on the leakage rate.Under the influence of cavitation effect and surface waviness,the opening force of seal face generated by velocity shear can be increased by more than 50%,and complete upstream pumping of fluid is formed.The increase of seal pressure and film thickness reduces the upstream pumping performance and sealing performance of the fluid.